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Axcelis Technologies Inc (ACLS)

CEO compensation · Industrials · FY2025
CEO total comp
$5.10M
Sector percentile
32.8th
Sector median
$7.92M
CEO pay ratio
—

Versus Industrials peers

Russell J. Low's FY2025 total of $5.10M ranks at the 32.8th percentile among 245 sector CEOs · sector median $7.92M · p75 $12.62M.

CEO pay mix

CEO total comp over time

Named Executive Officers — FY2025

ExecutiveTitleSalaryBonusStockOptionIncentiveOtherTotalSource
Russell J. Low President and Chief Executive Officer $0.61M—$3.85M —$0.63M$0.01M $5.10M SEC ↗
James G. Coogan Executive Vice President and Chief Financial Officer $0.47M—$1.54M —$0.34M$0.01M $2.36M SEC ↗
Eileen J. Evans Executive Vice President, HR and Legal, and General Counsel $0.38M—$0.90M —$0.24M$0.09M $1.61M SEC ↗
Gerald M. Blumenstock Executive Vice President, Research, Development, and Engineering $0.31M—$0.77M —$0.19M$0.01M $1.29M SEC ↗
Gregory F. Redinbo Executive Vice President, Marketing and Applications $0.31M—$0.77M —$0.19M$0.01M $1.29M SEC ↗
Christopher J. Tatnall Executive Vice President, Global Customer Operations $0.31M—$0.77M —$0.19M$0.01M $1.29M SEC ↗

Every figure links to its source SEC proxy (DEF 14A). Extraction: edgar-html+claude-haiku.